Structure and property transitions of Al-based binary alloy coatings by magnetron sputtering

摘要

Al-M (M = Ti, Cr, Mo, W) alloy coatings were subjected to DC magnetron sputtering by a rapid method to analyze the evolution of coating structureswith composition. Pure Al andMtargetswere used to deposit coating arrays across the entire binary range of Al-Malloys. AllAl-Malloys exhibited a specific amorphicity range. Al-Ti and Al-Cr alloyswere completelyamorphous,whereas Al-Moand Al-Walloys possessed a range ofamorphous- crystalline mixtures. Results revealed that Al-Ti alloys had the widest amorphicity range. Nanoindentation tests indicated that the hardness andmodulus of amorphous alloyswere higher than those of solid solutions for Al-M alloys.