Effects of Mg concentration on solubility and chemical state of N in N-doped MgZnO alloy

摘要

Solubility and chemical state of N in an N-doped Mg_xZn _(1-x)O film were studied by using Raman and x-ray photoelectron spectroscopy. Three anomalous Raman peaks are observed at 272, 580, and 642 cm~(-1), respectively, and are demonstrated to be only related to substitution of N for O site (N_O) but not to substitution of N _2 for O site (N_2)_O. The solubility of the N_O is dominated by Mg concentration and chemical potentials of N and O in growth condition. The chemical state of the N can change from coexistence of (N_2)_O and N_O to single (N_2) _O with increasing Mg concentration.