Large-area YBCO films with low-R_s prepared by excimer-laser-assisted MOD (ELAMOD) on sapphire substrates

摘要

High performance YBa_2Cu_3O_(7-y) (YBCO) films with large area (50 mm-square) and 300 nm-thick were prepared by a combination of excimer-laser-assisted metalorganic deposition (ELAMOD) and conventional MOD using a fluorine-free coating solution. A characteristic feature in the ELAMOD process is that KrF excimer laser is irradiated on the solution-coated surface of specimen in an ambient atmosphere. The YBCO films on CeO_2-buffered r-cut sapphire substrates showed low surface resistance (R_s), high superconducting current density (J_c), and good reproducibility in both R_s and J_c. The R_s and J_c values of the films were 0.6 mΩ (12 GHz) and around 2.0 MA/cm~2 at 77.3 K, respectively.