A numerical scattering calculation method for defective gratings is proposed. This method is based on an integral equation method that computes a difference-field distribution, which is the difference between the scattering fields with and without the defect, and it is possible to simulate the arbitrary (finite) size and shape of a defect in the grating without any limitation. A calculation example is also presented to demonstrate the fast convergence and high accuracy of this method.
展开▼