Hybrid Si-LiNbO_(3) microring electro-optically tunable resonators for active photonic devices

摘要

Hybrid Si-LiNbO_(3) electro-optic tunable ring resonators have been proposed and demonstrated as a path to achieving ultracompact and high-speed electro-optic devices. Free standing single crystal LiNbO_(3) microplatelets ((approx)mm long and approx1 (mu)m thick) were obtained from a z-cut LiNbO_(3) substrate by ion implantation and thermal treatment. The platelets were transferred and thermally bonded on top of Si resonators that were fabricated in a Si-on-insulator platform by a 0.18 (mu)m standard complementary metal-oxide-semiconductor process. For the hybrid microring resonator, a free spectral range of 16.5 nm, a finesse F of approx1.67 X 10~(2), a Q-factor of approx1.68 X 10~(4), and an effective r coefficient of approx1.7pm/V were achieved for the TE mode. These values are in good agreement with the calculated results.