Absolute ultra-precision measurement of high-numerical-aperture spherical surface by high-order shift-rotation method using Zernike polynomials

摘要

We propose a high-order shift-rotation absolute ultra-precision measurement method to calibrate the misalignment aberration and reference surface deviation in high-numerical-aperture spherical surface testing. Based on high-order approximation, the high-order misalignment aberrations are deduced. Both the computer simulation and experimental results confirm the feasibility of the proposed absolute ultra-precision measurement method. The high-order misalignment aberrations and reference surface deviation can be removed from the measured results by our absolute measurement method. The high-order shift-rotation absolute measurement method can get the accuracy of nanometer level in high-numerical-aperture spherical surface testing. (C) 2015 Elsevier B.V. All rights reserved.