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A compact and low-loss 1 × 8 optical power splitter using silica-based PLC on quartz substrate

机译:在石英基板上使用基于二氧化硅的PLC的紧凑型低损耗1×8光功率分配器

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摘要

In this paper, a compact, low-loss and good-uniformity 1 × 8 optical power splitter with new Y-branch structure is demonstrated using silica-based PLC technology on quartz substrate. Broadening waveguide and transition waveguide of the new Y-branch are optimized by using 3D BPM. The measurement results show that the insertion loss (IL) and the uniformity (UNIF) of the splitters are less than 9.5 dB and 0.35 dB, respectively, in the wavelength range from 1.26 μm to 1.65 μm, and the total product ratio of premium grade in a whole 6 in. wafer is more than 95%. The results mean that our technology completely satisfies the need of mass manufacture.
机译:在本文中,使用基于石英的PLC技术在石英衬底上演示了一种紧凑的,低损耗,均匀性好的1×8光功率分配器,具有新型Y分支结构。通过使用3D BPM对新型Y分支的加宽波导和过渡波导进行了优化。测量结果表明,在1.26μm至1.65μm的波长范围内,分光器的插入损耗(IL)和均匀度(UNIF)分别小于9.5 dB和0.35 dB,并且优质级产品的总产品比率整个6英寸晶圆的面积超过95%。结果表明,我们的技术完全满足了批量生产的需求。

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