Phase-shifting interferometry with four interferograms using linear polarization modulation and a Ronchi grating displaced by only a small unknown amount

摘要

A method to reduce the number of captures needed in phase-shifting interferometry is proposed on the basis of grating interferometry and modulation of linear polarization. The case of four interferograms is considered. A common-path interferometer is used with two windows in the object plane and a Ronchi grating as the pupil, thus forming several replicated images of each window over the image plane. The replicated images, under proper matching conditions, superpose in such a way so that they produce interference patterns. Orders 0 and +1 and -1 and 0 form useful patterns to extract the optical phase differences associated to the windows. A phase of pi is introduced between these orders using linear polarizing filters placed in the windows and also in the replicated windows, so two pi-shifted patterns can be captured in one shot. An unknown translation is then applied to the grating in order to produce another shift in the each pattern. A second and final shot captures these last patterns. The actual grating displacement and the phase shift can be determined according to the method proposed by Kreis before applying proper phase-shifting techniques to finally calculate the phase difference distribution between windows. Related simulations and experimental results are given.