Reconfiguring gratings of slanted plasmonic nanocolumns by ion beam irradiation

摘要

Gratings with slanted plasmonic nanocolumns of silver (Ag) on top fabricated by physical vapor deposition at large oblique angles on predefined gratings show unique plasmonic properties. These aligned nanocolumns with high-aspect ratios can be uniformly re-oriented to any desired angle of slant by ion beam irradiation. A focused ion beam (FIB) has been used as the ion source here. The plastic deformation of the nanocolumns arises due to defect formation caused by the energetic ions and can enable the complete tuning of the photonic and plasmonic properties of the grating through the slant angle. The reorientation can be uniformly carried over large areas of 0.2 mm(2) with the FIB and the diffraction patterns from the reoriented grating show large changes in the diffraction efficiencies. Electromagnetic simulations of the grating structures reveal large changes in the photonic properties with the slant angle such as diffraction efficiencies and the electromagnetic near fields.