Nanoprocessing and Nanofabrication of a Structured Polymer Film by the Focused-Ion-Beam Technique

摘要

The focused-ion-beam(FIB)technique is a powerful tool for semiconductor-related processing and is routinely used for failure analysis,integrated circuit debugging and repair,etc.Thus,the use of a high-energy FIB for mask-less patterning is a well-established technique in microelectronics and mi-crofabrication.1 Micromilling in silicon is particularly useful in microelectric-mechanic systems,micro-opto-mechanic systems,microsensors,and actuators.