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Advantages and challenges of optical coating production with indirect monochromatic monitoring

机译:间接单色监测在光学镀膜生产中的优势和挑战

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摘要

In this paper, we present our recent studies on raising the quality of optical coating production with an indirect monochromatic monitoring system. Preproduction error analysis and computational manufacturing are used to estimate potential advantages of application of indirect optical monitoring. It is then demonstrated that a key issue for realization of this advantage is accurate specification of tooling factors for layer thicknesses on test glasses. The tooling factors are precalibrated using single layer depositions and then are corrected using results of reverse engineering for the first production run. It is found that a gradual variation of tooling factors of low index layers is the main error factor in the first deposition run. Finally, we redeposit our coating with a modified monitoring strategy, taking into account this factor. The new experimental results show excellent correspondence with the theoretical spectral performance. (C) 2015 Optical Society of America
机译:在本文中,我们介绍了我们最近通过间接单色监控系统提高光学镀膜生产质量的研究。预生产误差分析和计算制造用于估计间接光学监控应用的潜在优势。然后证明了实现此优势的关键问题是测试玻璃上层厚度的加工系数的准确规格。使用单层沉积对工具系数进行预校准,然后针对首次生产运行使用反向工程结果对其进行校正。已经发现,低折射率层的加工因子的逐渐变化是第一沉积运行中的主要误差因子。最后,考虑到这个因素,我们使用修改后的监控策略重新沉积涂层。新的实验结果显示出与理论光谱性能的极佳对应。 (C)2015年美国眼镜学会

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