Amplitude filter and Zernike polynomial expansion method for quality control of microlens arrays

摘要

This paper deals with a computer simulation and an experimental realization of an optical setup for automatic quality control of microlens arrays. The method is based on a 4f coherent light correlator setup with an amplitude filter placed in the Fourier plane. The output intensity signal is proportional to the first derivative of the distortion of the input wavefront. An analysis can be carried out with the use of the Zernike polynomial expansion method. It must be carried out separately for each lens, but it allows for a more precise, quantitative assessment of their quality. What is important is that the analysis is computer-based and performed on the basis of the initial single optical measurement.