首页> 外文期刊>Applied optics >Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating
【24h】

Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating

机译:非均质宽带广角抗反射涂层的沉积和光谱性能

获取原文
获取原文并翻译 | 示例
获取外文期刊封面目录资料

摘要

Gradient index coatings and optical filters are a challenge for fabrication. In a round-robin experiment, basically the same hybrid antireflection coating for the visible spectral region, combining homogeneous refractive index layers of pure materials and linear gradient refractive index layers of material mixtures, has been deposited. The experiment involved three different deposition techniques: electron-beam evaporation, ion-beam sputtering, and radio frequency magnetron sputtering. The material combinations used by these techniques were Nb_(2)O_(5)/SiO_(2), TiO_(2)/SiO_(2), and Ta_(2)O_(5)/SiO_(2), respectively. The spectral performances of samples coated on one side and on both sides have been compared to the corresponding theoretical spectra of the designed profile. Also, the reproducibility of results for each process is verified. Finally, it is shown that ion-beam sputtering gave the best results in terms of deviation from the theoretical performance and reproducibility.
机译:梯度折射率涂层和滤光片是制造的挑战。在循环实验中,已经沉积了用于可见光谱区域的基本相同的混合抗反射涂层,其结合了纯材料的均质折射率层和材料混合物的线性梯度折射率层。实验涉及三种不同的沉积技术:电子束蒸发,离子束溅射和射频磁控溅射。这些技术使用的材料组合分别为Nb_(2)O_(5)/ SiO_(2),TiO_(2)/ SiO_(2)和Ta_(2)O_(5)/ SiO_(2)。将一侧和两侧涂覆的样品的光谱性能与设计轮廓的相应理论光谱进行了比较。此外,还可以验证每个过程的结果可重复性。最后,结果表明,离子束溅射在偏离理论性能和可重复性方面给出了最佳结果。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号