Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence

摘要

The optical parameters of a SiO_(2) thin-film coating determined from the spectral reflectance and transmittance measurements at various incidence angles, including the normal incidence and the Brewster's angle, are compared in this paper. The high-accuracy measurements were carried out through visible-near-infrared spectral regions by using our purpose-built instruments. The optical parameters obtained from the reflectance and the transmittance data are consistent over the angles of incidence and agree within 0.2percent. The effect of important systematic factors in the oblique-incidence spectrophotometric measurements is also discussed.