Development in situ for gratings recorded in photoresist

摘要

A technique for developing recording gratings in situ in Photoresist Shipley S-1822 is described. The developing process is accomplished by use of a spray without removing the sample from the optical setup. The results for the diffraction efficiency show that there is not a large difference between gratings achieved with the traditional wet development process and those obtained with the in situ developing technique. The potential of this in situ developing technique is shown with a moire interferometric experimental setup used for displacement showing.