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Absolute interferometric test of aspheres by use of twin computer-generated holograms

机译:使用双计算机生成的全息图对非球面进行绝对干涉测量

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A complete absolute interferometric test of axially symmetric aspheres is presented. The method is based on a specially designed computer-generated hologram (CGH) that reconstructs an aspherical wave as well as a spherical auxiliary wave. Since both phase functions have the same symmetry and their pattern is simultaneously encoded, we call this type of multiplex hologram a Twin-CGH. The spherical wave is used for calibration. The aberrations of the spherical auxiliary wave are measured absolutely with either a spherical mirror or an absolute test for Fresnel zone plates. Thus the two types of aberration inherent in the CGH can be identified and separated from each other. The errors of the spherical wave can be transferred to those of the aspherical wave. Two different methods that use Twin-CGHs for absolute testing of aspheric surfaces are described. Test procedures are explained, equations are derived, and experimental results are presented. A mutual comparison of the two results and a comparison with the established N-position rotation test are given.
机译:提出了轴对称非球面的完整绝对干涉测试。该方法基于经过特殊设计的计算机生成的全息图(CGH),该全息图可重建非球面波和球形辅助波。由于两个相位函数都具有相同的对称性,并且它们的图案同时被编码,因此我们将这种类型的多重全息图称为Twin-CGH。球面波用于校准。球面辅助波的像差可通过球面镜或菲涅耳波带片的绝对测试来绝对测量。因此,可以识别出CGH固有的两种像差并将其彼此分离。球面波的误差可以转换为非球面波的误差。描述了两种使用Twin-CGH进行非球面绝对测试的方法。解释了测试程序,推导了方程,并给出了实验结果。给出了两个结果的相互比较以及与已建立的N位置旋转测试的比较。

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    《Applied optics》 |2003年第22期|共12页
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