Reduction of the SIMS Matrix Effect Using the Storing Matter Technique: A Case Study on Ti in Different Matrices

摘要

Matrix effects in secondary ion mass spectrometry render quantitative analysis difficult. In this paper, we report on the quantitative potential of the so-called storing matter technique. On the basis of a case study focusing on Ti sputtered from five different chemical environments (Ti, TiB_2,TiC, TiN and TiO_2), we demonstrate for the first time that the SIMS matrix effect can be avoided in a multitude of matrices by this novel approach. The effect of the collector material (Au, Ag, Cu, and Ta) on the overall efficiency of the storing matter process is investigated. In addition, the influence of oxygen on the obtained useful yields is exposed. Finally, the performance of the storing matter technique is compared to standard SIMS analysis.