Monoclinic to tetragonal phase transition in ZrO_2 thin films under swift heavy ion irradiation: Structural and electronic structure study

摘要

ZrO_2 thin films were deposited on Si (100) substrates using pulsed laser deposition. Swift heavy ion irradiation experiments, with different ion fluence, were performed using 200 MeV Ag-ion beam. X-ray diffraction, Raman spectroscopy and O K - edge X-ray absorption spectroscopy measurements confirmed the dissolution of monoclinic phase and fruition of tetragonal phase of ZrO_2 with the increase of ion fluence. The mechanism of such structural evolutions is briefly discussed in light of ion-irradiation induced local temperature rising, overlapping of latent tracks and energy loss processes.