The analytical model of interaction of a subpicosecond laser pulse with ultrathin films is offered. With the help of the given model, the optimization of a carbon Ly-α line emission falling in the range of "water window"—3.38 nm is considered. The analysis of optimum conditions for line emission at film-laser interaction is given. The results of calculations using the model are in agreement with those of numerical simulations and the available experimental data.
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