東光太学 未来情報産業研究館/スーパークリーンルーム：フラクチュエーションフリーファリティー

摘要

New Industry Creation Hatchery Center (NICHe), Tohoku University is a research center which conducts R&D through manufacture of ultrafine semiconductor, and it was constructed based on concepts of "fluctuation free, variation free in all phenomena that occur on a semiconductor wafer" and "instant building-up technology." Newly constructing the concept "FFF" (Fluctuation Free Facility) which innovates the old concept of cleanroom, new technologies controlling not only temperature and humidity, dust, airflow, and micro-vibration but also emission gas such as organic and inorganic, static electricity, earth, variation in space magnetic field, etc., were achieved, by developing and examining new technologies under the cooperation among sectors which specializes in construction, electricity, air-conditioning, deionized water, gas supply, and so on under the instruction of Ohmi lab at Tohoku University.