Standardization of chemical analysis of fine ceramics

摘要

Recent situation of standardization of chemical analysis of fine ceramics was described. Analytical methods of fine powders have been established for silicon nitride/silicon carbide, and alumina/aluminum nitride as described in JIS and JCRS,respectively. Characterization methods of several kinds of raw powders and sintered fine ceramics which have been studied so far in NIRIN were also described. The necessity of standard reference materials of fine ceramics for precise microbeam analysiswas discussed.