Fabrication of Large Area Two- and Three-Dimensional Periodic Structures by Holography Interference Technique

摘要

A simple and efficient optical interference method for fabricating high quality large area two- and three-dimensional (2D and 3D) periodic structures was demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures were created depending on the number of exposure and the rotation angle of the sample for each exposure. Three-exposure, in particular, resulted in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. Furthermore, we proposed two methods to embed the defects to the periodic structures that fabricated by multi-exposure of two-beam interference technique.