CMOS MEMS and Its Applications in Sensors

摘要

CMOS integrated sensors possess the advantages of size miniaturization, improved sensitivity and electrical routing capability. Since the emerging applications rising, the requirements for micro sensors are diverse in size, performance, cost and so on. This article discusses the common used sensing mechanisms benefited by the integration with CMOS technology. Various fabrication approaches are introduced to realize the CMOS integrated sensors. Finally, three existed examples including hot wire anemometer, capacitive accelerometer and condenser microphone are used to demonstrate the implementation of CMOS micro sensors.