Electron Probe Microanalyzer

摘要

Electron probe microanalyzer (EPMA) is a scanning electron microscope which employs the focused electron beam to analyze the composition in a micro region. The analysis method of EPMA is similar to the commercial energy dispersive spectrometer (EDS). However, the operation principle is entirely different from EDS. The theory of EPMA is to analyze the wavelength of characteristic X-ray to evaluate the element concentration. The quantitative analysis can be carried out by EPMA due to the good P/B ratio of spectrum with the resolution better than 100 ppm. In this article, the development and theory of EPMA are revealed, and then the analysis methods and applications are also described.