Optical sensor with a self-mixing laser diode for measurement of small-amplitude vibration

摘要

Self-mixing interference in a semiconductor laser is employed for the measurement of small-amplitude vibration. It has been confirmed by numerical simulations and experiments that there is a linear relation between the amplitude of a signal detected from a self-mixing laser diode (SM-LD) and the ultrasonic vibration amplitude which is 0.1 μm～0.25 μm peak-to-peak.