フレネルゾーンプレートを用いたX線微イメ一ジング技術の開発

摘要

X-ray microscopy and microtomography have been developed for the purpose of two-/three-dimensional high spatial resolution imaging at SPring-8. A two-dimensional imaging with better than 100 nm spatial resolution is now routinely available. And three-dimensional tomographic imaging with 200 nm spatial resolution is now open for user experiment. In this report, present status and some applications of x-ray microscopy and microtomography at the SPring-8 public beamlines are described.