レーザー誘起ドット転写法によるナノドッ卜の作製

摘要

Laser-induced dot transfer (LIDT) provides a method for arranging a nano- or microdot at a given position on substrates under room-temperature atmospheric conditions. Based on this method, we have developed site- and size-controlled micropatterning of functional dots. The downsizing of dots can be realized by decreasing source film thickness and/or laser spot size, resulting in FeSi2 nanodot array with a dot diameter of about 500 nm. In this work, the adhesion of dots to a silica glass substrate surface was also examined by the immersion of a FeSi2 microdot array into 5% HF solution followed by washing in ultrapure water. As a result, there was no drastic change in dot filling rate for the array immersed for 2 min, suggesting that the dots were not simply placed on the substrate without being fixed. They might be attached to the substrate surface through a binding force induced via LIDT process.