This paper describes an investigation of high dispersion dielectric ceramic powder process and internal electrode process for multilayer ceramic capacitors(MLC) with thin dielectric layers. A high dispersion process homogenizes grains and makes them fine. Green sheet defects, such as roughness, pin-hole decrease when applying the high dispersion process to the ceramic powder in slurry. The thickness control of the internal electrodes and the saddle phenomena are necessary to prevent occurrence of delamination. Cutting off large and cohesive grains in the internal electrodes have good effects on thin dielectric layers. By using these technologies mentioned above, the manufacturing process for MLC with large capacitance made of dielectric layers less than 10 #mu#m in thickness using Y5U temperature characteristic relaxor has been developed.
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