We have studied a new method to measure the absolute-humidity using a humidity sensor with only a single micro-air-bridge beater, based on the thermal-conductivity change effect in the humid air. The micro-air-bridge beater is fabricated by the micro machining technique. Using this method, we have developed a micro sensor which can detect both of temperature and humidity simultaneously.The features of this sensor are as follows1) Single element driving.2) Both of temperature and humidity detection.3) Quick response to humidity change.4) Small size.
展开▼
