ダイヤモンド状炭素（DLC）膜の実用化の現状と今後の展望

摘要

DLC film is a diamond like amorphous carbon film. It has excellent tribological properties and has been applied to the mechanical parts which need the high wear resistance and low friction. Many kinds of methods have been developed to deposit the DLC film. Lately, DLC film can be coated on several kinds of materials, and can be used for wider applications. In the fields of the tribology under the higher load, DLC film is now applicable to the cutting tools. DLC film can be applied to the rubber or the polymer substrate which are easily damaged by the thermal energy. From the viewpoint of the global environment protection, DLC film is developed to apply the automotive engine parts to improve the fuel economy. Furthermore, beside the tribological uses, new applications such as the gas barrier of the polymer are developed. New applications and new investigations are reviewed about the DLC film.