Sensitivity of determining the concentration gradient in the analysis of thin films by X-ray spectrometry with a variable glancing angle

摘要

Effects of various factors on the sensitivity of X-ray spectrometry with angular scanning with the excitation of radiation by X-ray photons and accelerated ions is studied; It is found that, for a certain combination of the energy Of primary radiation and the absorption parameters of the sample, a range of radiation entrance and exit angles exists in which the sensitivity to the concentration gradient reaches a maximum. It is also shown that the effect of the test-element concentration gradient on the analytical line intensity increases with decreasing total element content in the test layer. Conditions that provide the highest sensitivity to the concentration gradient for analysis by X-ray spectrometry with a variable glancing angle of the primary beam of X-ray photons or accelerated ions are determined.