Fabrication and characterization of multi-layered ceramic ion generators based on dielectric barrier discharge

摘要

Multi-layered ceramic ion generators based on dielectric barrier discharge (DBD) were fabricated by a lamination process embedding the device with thick film patterns for applications of air purification and sterilization. The structure of the dielectric barrier discharge module consists of seven laminated Al2O3 layers containing top and inner conductor patterns functioning for the ion generators. The top layer of the laminated structure was passivated with MgO thick film of 20-30 mu m for protection physically and electrically. Negative ions are generated on the top electrode layer with a sufficient applied voltage. Compared to a rectangular generator pattern, a radial pattern generated more negative ions by inducing electrons effectively around its sharp edges. The degree of negative ion generation was analyzed with two different top electrode patterns and different size of one of top patterns. The values of capacitance of the dielectric layer with respect to them. It was also observed that the appropriate magnitude of applied voltage was also very critical in determining enough ion generation without detrimental dielectric breakdown.