Effects of Substrate Temperatures on the Structure and UV-shielding Properties of TiO_2-CeO_2 Films Deposited on Glass by Radio-frequency Magnetron Sputtering

摘要

TiO_2-CeO_2 films were deposited on soda- lime glass substrates at varied substrate temperatures by if magnetron sputtering using 40 percent molar TiO_2 - 60 percent molar CeO_2 ceramic target in Ar:O_2 = 95 :5 atmosphere. The structure surface composition UV-visible spectra of the films were measured by scanning electron microscopy and X- ray diffraction, and X- ray photoelectron spectroscopy, respectively. The experimental results show that the films are amorphous, there are only Ti ~(4+) and Ce~(4+) on the surface of the films, the obtained TiO_2-CeO_2 films show a good uniformity and high densification, and the films deposited on the glass can shield ultraviolet light without significant absorption of visible light, the films deposited on substrates at room temperature and 220 deg C absorb UV effectively.