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Fabrication of an elastomeric rib waveguide Bragg grating filter

机译:弹性肋波导布拉格光栅滤波器的制造

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摘要

We report the design and fabrication of a Bragg grating device on a silicone-based elastomer rib waveguide, constructed using solvent-assisted microcontact molding and polymer casting techniques. The waveguide design utilizes polydimethylsiloxane (PDMS) and hard polydimethylsiloxane (hPDMS) polymers as core and cladding materials, with a period of similar to 0.55 mu m, a depth of similar to 350 nm, and a grating length of 6 mm. Fabrication is relatively simple, with the hPDMS/PDMS waveguide and gratings cast from a two-layer mold made of a phenolic resin-based positive photoresist and an epoxy Novolak resin-based negative photoresist. The mold we have designed has a demonstrated operational lifespan in excess of ten successful waveguide fabrications. The transmission spectra of the resulting gratings were measured, with test results showing a band-rejection gain of -17 dB and a 3 dB bandwidth of similar to 3 nm at transmission.
机译:我们报告了使用溶剂辅助微接触成型和聚合物浇铸技术构建的基于有机硅的弹性肋波导上的布拉格光栅装置的设计和制造。波导设计使用聚二甲基硅氧烷(PDMS)和硬聚二甲基硅氧烷(hPDMS)聚合物作为芯和包层材料,周期类似于0.55μm,深度类似于350 nm,光栅长度为6 mm。 hPDMS / PDMS波导和光栅是由两层模具铸造而成的,该模具由酚醛树脂基正性光刻胶和环氧酚醛树脂基负性光刻胶制成。我们设计的模具在超过十次成功的波导制造过程中具有已证明的使用寿命。测量了所得光栅的透射光谱,测试结果表明,在透射时的带阻增益为-17 dB,3 dB带宽接近3 nm。

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