Influence of structural fluctuations on Q factor of nanocavities at the surface of three-dimensional photonic crystals

摘要

We investigate the influence of structural fluctuations on the Q factor of nanocavities at the surface of 3D photonic crystals with a stacked-stripe structure. We analyze the Q factor of nanocavities by 3D finite-difference time-domain calculations in consideration of the misalignment of the position of the stacked layers and the fluctuation of the patterns in each layer. Misalignment of the order of ～50 nm has almost no influence on the Q factor, but the pattern fluctuations of the order of nanometers in each layer, especially in the surface layer, seriously impact the decrease of the Q factor.