Design and optimization of waveguide sensitivity in slot microring sensors

摘要

The waveguide sensitivity of silicon slot microring sensors and single- and double-slot microrings is analyzed using a combination of the effective index and the Airy-functions-based mode matching methods. The sensing properties of these two cases are investigated under a variety of geometries. The trends of the waveguide sensitivity on each geometrical parameter are obtained. In addition, the influence of asymmetry on the waveguide sensitivity is also investigated. Calculation also illustrates that double-slot microrings offer wider fabrication tolerance than single-slot ones. These results provide a guideline and insights for designing microring geometry to satisfy the desired sensing requirements and performance.