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Resolution for off-axis illumination

机译:离轴照明分辨率

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摘要

The fundamental limit to resolution of a perfect lens for off-axis object points is considered. It has been shown previously that resolution decreases with illumination. Here it is shown that the relative decrease in resolution with illumination angle is reduced for lenses of higher numerical aperture. These results are of importance for optical systems that combine high aperture with large field of view, such as lithographic lenses. # 1998 Optical Society of America [S0740-3232(98)00402-5] OCIS codes: 220.2560, 050.1940, 120.4570.
机译:考虑了离轴物体点的完美镜头分辨率的基本限制。先前已经表明,分辨率随着照明而降低。在此表明,对于较大数值孔径的镜头,分辨率随照明角度的相对降低有所减小。这些结果对于将高光圈和大视野结合在一起的光学系统(例如光刻镜头)非常重要。 #1998美国光学学会[S0740-3232(98)00402-5] OCIS代码:220.2560、050.1940、120.4570。

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