Diamond kinoform hard X-ray refractive lenses: design, nanofabrication and testing

摘要

Motivated by the anticipated advantageous performance of diamond kinoform refractive lenses for synchrotron X-ray radiation studies, this report focuses on progress in designing, nanofabricating and testing of their focusing performance. The method involves using lift-off and plasma etching to reproduce a planar definition of numerically determined kinoform refractive optics. Tests of the focusing action of a diamond kinoform refractive lens at the APS 8-ID-I beamline demonstrate angular control of the focal spot.