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A simple chemical spray pyrolysis apparatus for thin film preparation

机译:一种用于薄膜制备的简单化学喷雾热解装置

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摘要

Materials in thin film form such as opto-electronic devices, electrochromic devices, narrow band coating, temperature controllers in satellites, sensors etc. have attracted the attention due to their wide range of applications both in industry and in research. Techniques that are simple and economical have attracted attention for commercial and other reasons. The chemical spray pyrolysis (CSP) technique offers an extremely easy way to prepare films with dopants, virtually any element in any proportion by merely adding it in a spray solution. The deposition rate and thickness of the film can easily be controlled for a wide range. It also offers an opportunity to have reactions at low temperatures (100-500). These methods can also produce films on substrates that are less robust materials and on large surfaces. The versatile nature of this technique lies in the way various parameters that include effect of precursors, dopants, substrates temperature, in-situ annealing treatments, solution concentrations and so on can easily be controlled. Various types of metal oxide, metallic spinel oxide, binary and ternary chalcogenides and superconducting oxides can be prepared. The results obtained using a home built set up on materials like CdS and NiO, where in reasonably good results are obtained are discussed in detail.
机译:薄膜形式的材料,例如光电器件,电致变色器件,窄带涂层,卫星中的温度控制器,传感器等,由于其在工业和研究中的广泛应用而引起了人们的关注。由于商业和其他原因,简单而经济的技术引起了人们的注意。化学喷雾热解(CSP)技术提供了一种非常简单的方法来制备带有掺杂剂的薄膜,实际上只要将其添加到喷雾溶液中,就可以以任何比例添加几乎任何元素。可以容易地在宽范围内控制膜的沉积速率和厚度。它还提供了在低温(100-500)下发生反应的机会。这些方法还可以在坚固性较差的材料和较大表面上生产薄膜。该技术的通用性在于可以轻松地控制各种参数,包括前体,掺杂剂,衬底温度,原位退火处理,溶液浓度等的影响。可以制备各种类型的金属氧化物,金属尖晶石氧化物,二元和三元硫属化物和超导氧化物。将详细讨论使用在CdS和NiO等材料上建立的家庭结构所获得的结果,在这些结构中可以获得相当不错的结果。

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