State-of-the-art Laser-based Systems for Precision Mechanical Measurements

摘要

This paper presents some state-of-the-art laser-based systems developed for precision mechanical measurements, especially for dimensional measurement. After a brief discussion on basic characteristics of laser, which form the fundaments of laser metrology, a number of optical sensors and measurement systems employing laser diode as the light source for precision measurement of length, position, angle and surface profile are presented.