Physicochemistry in Processes of the Formation of Functional Surfaces of Glass and Sapphire (α-Al_2O_3) Components for Electronics and Optical Systems in Tribochemical Polishing

摘要

Publications on physicochemical processes of the formation of functional surfaces of glass and sapphire (α-Al_2O_3) components of electronics and optics have been reviewed. It has been found that to meet the requirements imposed on their surface condition, which should be at the atomic-smooth level, without tribochemical polishing, i.e. physicochemical interaction of the tool and workpiece materials at the final stage of machining, is impossible.