Design and fabrication of single mode rib waveguides using sol-gel derived organic-inorganic hybrid materials

摘要

Multi-layer buried rib waveguides were fabricated using sol-gel derived photopatternable organic-inorganic hybrid materials through multi-step spin coating and photolithography. A single mode circular waveguide at 1,550 nm was designed and fabricated using the equivalent refractive index method. Propagation loss in the order of 1.0 dB/cm was measured by cutback method. Waveguide thermal stability and thermo-optic coefficient were investigated using thermogravimetric analysis (TGA) and spectroscopic ellipsometry, respectively. Results suggest that the single mode waveguide can be used to develop thermal optical devices such as thermo-optic switches.