Phase transition properties of vanadium oxide films deposited by polymer-assisted deposition

摘要

Vanadium dioxide (VO2) films were synthesized on mica substrates by a polymer-assisted deposition method, followed by rapid annealing with different annealing temperatures. The crystalline structure and morphology of the films were investigated by XRD and FE-SEM, and their phase transition properties were studied by in situ FT-IR. The results indicated that the annealing temperature affected the crystalline structure and morphology of the films remarkably, which then resulted in varied phase transition properties. In particular, the films annealed at higher temperature showed more polycrystalline structure, increased particle size and reduced phase transition intensity. But the films exhibited the similar hysteresis temperature width with increasing annealing temperature.