New fabrication of multiple-layer microcoil using anodic oxidized aluminum

摘要

A multiple-layer microcoil is a promising candidate for micromagnetic sensors for probing cracks in pipes in power stations and plants. We proposed fabrication of multiple-layer microcoils combining Al anodic oxidation and photolithography, and conducted experiments with the following results: 1) Sputter-deposited Al was anodically oxidized and thickness of A1203 formed controlled by anodic-oxidation time. 2) A pattern with Al and Al{sub}2O{sub}3 was made by masking Al with photoresist to prevent anodic oxidation. 3) A multiple-layer Al and Al{sub}2O{sub}3 was fabricated by combining Al anodic oxidation and photolithography. 4) As these results shown, multiple-layer microcoils having both high inductance and low resistance were fabricated as proposed using a simple process and having a high potential application to smaller multiple-layer microcoils.