Epoxy-Based Multichannel Microelectrode for Insect Biopotential Recording

摘要

Microelectrodes are being developed in order to record action biopotentials of insects. Silicon was conventionally used as the electrode material and micro-electrodes were fabricated by anisotropic etching and reactive ion etching. Because electrode microprobe shape and size were very difficult to control, we propose a novel pin-shaped multichannel microelectrode. Epoxy-based UV photoresist must be used as the electrode material to facilitate the control of the microelectrode shape and size. Analysis of the electrical properties of this electrode showed that it has properties excellent enough to record insect biopotentials.