Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography

摘要

A method is proposed to fabricate conductive patterns and tracks on large area flexible substrates using a UV roll imprinting lithography process. A durable metal roll stamp, which is extendable to mass production, was fabricated by using a series of photolithography, electroforming and anti-adhesion coating processes. Indium tin oxide (ITO) conductive patterns and tracks with line widths of 2-20μm _ were formed by using the UV roll imprinting process and a subsequent etching process. The geometrical properties and electrical conductivity of fabricated ITO patterns and tracks were measured and analysed.