Active Oxygen Monitor Using Quartz Crystal Microbalance Method with Polymer Detection Layers

摘要

A novel trial based on a quartz crystal microbalance (QCM) sensor with various polymer thin-films prepared by physical deposition methods was undertaken to realize a quantification monitor for the active oxygen that is generated under surface treatment processes. Active oxygen, specifically atomic oxygen radicals under inductively coupled oxygen plasma, was successfully monitored using the polytetrafluoroethylene (PTFE), polyimide, and carbon coated QCM. This study also discusses the optical emission spectroscopy of the oxygen plasma and the distribution of atomic oxygen radicals inside the process chamber using a numerical simulation.