Resonant mechanism of bi-layered silicon micro-resonators under optical excitation

摘要

The analysis of the resonant mechanism for silicon micro-resonators under optical excitation based on the one-dimensional heat-flow theory and the thermal theory of elasticity is presented. Three effects, including the optical pressure effect, the longitudinal thermal strain effect and the Bi-coating effect, were investigated. After comparison with the other effects, the Bi-coating effect was found to be the most important effect in the optical excitation. A new amplitude model of a bi-layered silicon micro-resonator was deduced which was verified by experimental results.