LED-based digital holographic microscopy with slightly off-axis interferometry

摘要

An LED illuminated Linnik-type digital holographic microscope (DHM) for high-quality phase imaging is presented by the adoption of slightly off-axis two-step blind-phase-shifting interferometry (TB-PSI). Slightly off-axis interferometry lowers the requirement on the angle between the object and the reference waves as well as the requirement on the resolving power of the charge-coupled device (CCD) camera. In addition, the apparatus is cost-effective and offers ease of alignment. The phase-shifting DHM is simply implemented by mechanically moving the reference mirror while disposing of a precise phase modulator such as a piezoelectric transducer (PZT). The phase shift between the two interferograms is extracted by Fourier transformation analysis, and then the phase image is reconstructed. The performance of the TB-PSI used in the scheme is analyzed. The phase imaging for nanostructured specimens is conducted, and the results demonstrate the feasibility of the scheme. The phase noise is reduced by 73% when compared to the result obtained with coherent illumination.