Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution

摘要

The supplementary zones surrounding an ordinary Fresnel zone plate (FZP) are utilized to improve the optical resolution at focus. Based on the Fresnel-Kirchhoff diffraction formula, an optimization model is used to design the supplementary zones-surrounded FZP (SZFZP). We justified this optimization model by comparing the numerical simulations and experimental measurements in the visible light region. As expected, the comparison shows a good fit between the simulation and measurement. Mostly, both results showed that the optical resolution and the focal intensity in the visible light region are improved by applying the optimized SZFZP. Afterwards, this model is used to design the SZFZP for applications in extreme ultraviolet (EUV) light. At this point, we demonstrated the ability to fabricate the optimized SZFZP in the EUV region. In addition, we simulated the focusing properties for the designed SZFZP. Consequently, the numerical results for EUV light focused by the designed SZFZP exhibited better performances in optical resolution and intensity.